Thus, it enables direct modification of the surfaces and structures, 18 as well as adjustment of the shape and size of materials deposited on complex substrates. 15–17 Taking the advantage of self-limiting surface adsorption nature of ALD, the target materials can be deposited with controllability and uniformity in atomic level. So far, significant number of elements and their oxides can be synthesized via ALD.
8–14 ALD is based on successive and alternative surface reactions from gas phase to fabricate thin films and overlayers in the nanometer range. Among various synthesis methods, atomic layer deposition (ALD) has been recently developed as an effective method to synthesize composite catalysts. 5–7 To design and obtain catalysts with the desired activity, selectivity, and stability, synthesis strategies to build precise configurations with direct modulation of reactive sites are of great importance. 1–4 The catalytic performance of composite catalysts strongly depends on their size, heterointerfaces, active sites, etc. Composite catalysts based on metal-oxide with designed structures perform an irreplaceable role for most applications. Catalysts are widely utilized to accelerate chemical reactions by decreasing reaction barriers in various industrial syntheses, environment pollution control, energy conversion, and so on.
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